Electrical contact for high dielectric constant capacitors and method for fabricating the same
US6348709B1 · kind B1 · utility
99Cited by
23References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 1999 |
| Grant date | Feb 19, 2002 |
| Priority date | — |
| Expiry date | Mar 15, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/696
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrical contact includes a non-conductive spacer surrounding conductive plug material along the full height of the contact. The spacer inhibits oxide and other diffusion through the contact. In the illustrated embodiment, the contact includes metals or metal oxides which are resistant to oxidation, and additional conductive barrier layers. The contact is particularly useful in integrated circuits which include high dielectric constant materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.