Method and apparatus for monitoring a process by employing principal component analysis
US6368975B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1999 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Jul 7, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1293
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process). Principal component analysis then is performed on the measured correlated attributes so as to generate at least one production principal component; and the at least one production principal component is compared to a principal component associated with a calibration process (a calibration principal component). The calibration principal component is obtained by measuring correlated attributes of a calibration process, and by performing principal component analysis on the measured correlated attributes so as to generate at least one principal component. A principal component having a feature indicative of at least one of a desired process state, process event and chamber state then is identified and is designated as the calibration principal component. Preferably the at least one production principal component is compared to the calibration principal component by computing the inner product of the calibration and production principal components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.