Corrosion resistant coating
US6379492B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 1999 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Oct 26, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32559
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A corrosion resistant part comprising a protective coating formed upon a component part. The protective coating comprises magnesium fluoride, which is substantially pure and substantially dense. Preferably, the coating is at least about 99% pure and at least about 85% dense. For example, such a coating can be formed upon the component part at a temperature of at least about 250° C. and a pressure of not more than about 1×10−5 torr. The resulting coating is effective in protecting the surfaces of an aluminum nitride heater against corrosion within a fluorine-containing environment inside a chemical vapor deposition chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.