Inventor · Santa Clara, CA, US

Won Bae Bang

51Patents
11h-index
69Co-inventors
81Inventor score

Filing activity: Oct 17, 1997 → Nov 18, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7758698B2 Dual top gas feed through distributor for high density plasma chamber Electricity 427 Active
US6110556A Lid assembly for a process chamber employing asymmetric flow geometries Emerging Cross-Sectional Technologies 163 Expired
US6117244A Deposition resistant lining for CVD chamber Emerging Cross-Sectional Technologies 78 Expired
US6397922B1 Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer Performing Operations; Transporting 62 Expired
US7335609B2 Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials Electricity 42 Expired
US7456116B2 Gap-fill depositions in the formation of silicon containing dielectric materials Chemistry; Metallurgy 37 Expired
US6629559B2 Molds for casting with customized internal structure to collapse upon cooling and to facilitate control of heat transfer Performing Operations; Transporting 28 Expired
US6063198A High pressure release device for semiconductor fabricating equipment Emerging Cross-Sectional Technologies 19 Expired
US7722719B2 Gas baffle and distributor for semiconductor processing chamber Electricity 14 Expired
US7011710B2 Concentration profile on demand gas delivery system (individual divert delivery system) Chemistry; Metallurgy 14 Expired
US6090206A Throttle valve providing enhanced cleaning Mechanical Engineering; Lighting; Heating 13 Expired
US6261374A Clog resistant gas delivery system Chemistry; Metallurgy 11 Expired
US9613829B1 Method for fabricating semiconductor package and semiconductor package using the same Electricity 11 Active
US5948958A Method and apparatus for verifying the calibration of semiconductor processing equipment Electricity 11 Expired
US7204888B2 Lift pin assembly for substrate processing Electricity 10 Expired
US10049954B2 Semiconductor package having routable encapsulated conductive substrate and method Electricity 7 Active
US7192486B2 Clog-resistant gas delivery system Chemistry; Metallurgy 6 Expired
US6267820A Clog resistant injection valve Emerging Cross-Sectional Technologies 5 Expired
US7806383B2 Slit valve Electricity 4 Active
US6235120A Coating for parts used in semiconductor processing chambers Emerging Cross-Sectional Technologies 4 Expired
US7413612B2 In situ substrate holder leveling method and apparatus Electricity 4 Expired
US6379492B2 Corrosion resistant coating Electricity 4 Expired
US9631481B1 Semiconductor device including leadframe with a combination of leads and lands and method Electricity 3 Active
US9552999B2 Packaged electronic device having reduced parasitic effects and method Electricity 2 Active
US7841582B2 Variable seal pressure slit valve doors for semiconductor manufacturing equipment Fixed Constructions 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.