Chen-An Chen
57Patents
13h-index
115Co-inventors
87Inventor score
Filing activity: Sep 23, 1996 → Feb 9, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6387207B1 | Integration of remote plasma generator with semiconductor processing chamber | Electricity | 840 | Expired |
| US6024799A | Chemical vapor deposition manifold | Chemistry; Metallurgy | 574 | Expired |
| US6998014B2 | Apparatus and method for plasma assisted deposition | Electricity | 93 | Expired |
| US6358327B1 | Method for endpoint detection using throttle valve position | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6303501A | Gas mixing apparatus and method | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6486082B1 | CVD plasma assisted lower dielectric constant sicoh film | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6066836A | High temperature resistive heater for a process chamber | Mechanical Engineering; Lighting; Heating | 29 | Expired |
| US6591850B2 | Method and apparatus for fluid flow control | Emerging Cross-Sectional Technologies | 29 | Expired |
| US8221601B2 | Maintainable substrate carrier for electroplating | Electricity | 27 | Active |
| US8317987B2 | Non-permeable substrate carrier for electroplating | Emerging Cross-Sectional Technologies | 25 | Active |
| US6068703A | Gas mixing apparatus and method | Performing Operations; Transporting | 22 | Expired |
| US9222193B2 | Non-permeable substrate carrier for electroplating | Emerging Cross-Sectional Technologies | 20 | Active |
| US6902629B2 | Method for cleaning a process chamber | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5948958A | Method and apparatus for verifying the calibration of semiconductor processing equipment | Electricity | 11 | Expired |
| US6261374A | Clog resistant gas delivery system | Chemistry; Metallurgy | 11 | Expired |
| US8255215B2 | Method and apparatus for locating speech keyword and speech recognition system | Physics | 10 | Active |
| US6506994B2 | Low profile thick film heaters in multi-slot bake chamber | Electricity | 9 | Expired |
| US8867286B2 | Repairable multi-layer memory chip stack and method thereof | Physics | 9 | Active |
| US9459319B2 | Device and method for generating input control signals of a serialized compressed scan circuit | Physics | 6 | Active |
| US6709721B2 | Purge heater design and process development for the improvement of low k film properties | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6267820A | Clog resistant injection valve | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6235120A | Coating for parts used in semiconductor processing chambers | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6596343B1 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals | Chemistry; Metallurgy | 4 | Expired |
| US7779784B2 | Apparatus and method for plasma assisted deposition | Electricity | 4 | Active |
| US6379492B2 | Corrosion resistant coating | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.