Heat-exchanging workholder for a vacuum unit

US6391112B1 · kind B1 · utility

Assignee

• Unaxis Trading Ltd · CH

Inventors

• Peter Mahler · Obertshausen, DE
• Michael Scherer · Crimmitschau, DE

Key dates

• Filing date: Feb 11, 2000
• Grant date: May 21, 2002
• Expiry date: Feb 11, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67109
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A workpiece holding device for a vacuum unit has coolable or heatable transfer plates (2) displaceable independently of one another in a baseplate (1) and each comprising a heat transfer surface (3) which is surrounded by an O-ring (4), is connected to a pipe (5) and, with a workpiece (15) which is pressed against the O-ring (4) by a holder (16), encloses a gap (20). The holder (16) can be locked to the baseplate (1). After lowering of the holder (16) into a closed position and load-free locking to the baseplate (1), the heat transfer plates (2) are pneumatically raised until in each case a stop (23, 22) becomes effective between said heat transfer plates and the holder (16) and determines the width of the gap (20). The gap (20) is then filled via the pipe (5) with a heat transfer medium, e.g. helium. After processing of the workpiece (15), the heat transfer plates (2) are lowered and the holder (16) is released again in a loadfree manner.