Patent · US Expired

Method and apparatus for in-situ testing of integrated circuit chips

US6414509B1 · kind B1 · utility

10Cited by
13References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 3, 2000
Grant dateJul 2, 2002
Priority date
Expiry dateMay 3, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3011
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of testing semiconductor chips is disclosed. The individual semiconductor chips have I/O, power, and ground contacts. In the method of the invention a chip carrier is provided. The chip carrier has contacts corresponding to the contacts on the semiconductor chip. The carrier contacts have dendritic surfaces. The chip contacts are brought into conductive contact with the conductor pads on the chip carrier. Test signal input vectors are applied to the inputs of the semiconductor chip, and output signal vectors are recovered from the semiconductor chip. After testing, the chip may be removed from the substrate. Alternatively, the chip may be bonded through the dendritic conductor pads to the substrate after successful testing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.