Patent · US Expired

High K dielectric de-coupling capacitor embedded in backend interconnect

US6417556B1 · kind B1 · utility

16Cited by
12References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 2, 2000
Grant dateJul 9, 2002
Priority date
Expiry dateFeb 2, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/682
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit (IC) including an integral, high k dielectric de-coupling capacitor constructed using a single conductive layer within the IC structure. The IC comprises a substrate, a dielectric layer disposed over the substrate, and a conductive layer disposed over the dielectric layer. The conductive layer includes a first line disposed adjacent to a second line, and a high k dielectric material disposed between the first line and the second line. The capacitor is formed between the first line and the second line separated by the high k dielectric material. The capacitor is connected by coupling the first line to a signal and coupling the second line to a capacitor signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.