Patent · US Expired

DRAM cell constructions, and methods of forming DRAM cells

US6429070B1 · kind B1 · utility

20Cited by
15References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 30, 2000
Grant dateAug 6, 2002
Priority date
Expiry dateAug 30, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S257/906

Abstract

The invention includes a method of forming a DRAM cell. A first substrate is formed to include first DRAM sub-structures separated from one another by an insulative material. A second semiconductor substrate including a monocrystalline material is bonded to the first substrate. After the bonding, second DRAM sub-structures are formed in electrical connection with the first DRAM sub-structures. The invention also includes a semiconductor structure which includes a capacitor structure, and a first substrate defined to encompass the capacitor structure. The semiconductor structure further includes a monocrystalline silicon substrate bonded to the first substrate and over the capacitor structure. Additionally, the semiconductor structure includes a transistor gate on the monocrystalline silicon substrate and operatively connected with the capacitor structure to define a DRAM cell.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.