Field effect transistor and method of its manufacture
US6429481B1 · kind B1 · utility
366Cited by
70References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1997 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Nov 14, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/513
Abstract
A trenched field effect transistor is provided that includes (a) a semiconductor substrate, (b) a trench extending a predetermined depth into the semiconductor substrate, (c) a pair of doped source junctions, positioned on opposite sides of the trench, (d) a doped heavy body positioned adjacent each source junction on the opposite side of the source junction from the trench, the deepest portion of the heavy body extending less deeply into said semiconductor substrate than the predetermined depth of the trench, and (e) a doped well surrounding the heavy body beneath the heavy body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.