In-situ metalization monitoring using eddy current measurements during the process for removing the film
US6433541B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Aug 7, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/72
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a method of obtaining information in-situ regarding a film of a sample using an eddy probe during a process for removing the film. The eddy probe has at least one sensing coil. An AC voltage is applied to the sensing coil(s) of the eddy probe. One or more first signals are measured in the sensing coil(s) of the eddy probe when the sensing coil(s) are positioned proximate the film of the sample. One or more second signals are measured in the sensing coil(s) of the eddy probe when the sensing coil(s) are positioned proximate to a reference material having a fixed composition and/or distance from the sensing coil. The first signals are calibrated based on the second signals so that undesired gain and/or phase changes within the first signals are corrected. A property value of the film is determined based on the calibrated first signals. An apparatus for performing the above described method is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.