Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS)
US6458984B1 · kind B1 · utility
10Cited by
3References
32Claims
0Family size
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Key dates
| Filing date | Mar 31, 2000 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Mar 31, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/20
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A method of purifying tetraethylorthosilicate (TEOS) to remove boron impurities therefrom, and a related method of analyzing TEOS to determine concentration of boron impurities therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.