Method and apparatus for implementing corrected species by monitoring specific state parameters
US6465263B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2000 |
| Grant date | Oct 15, 2002 |
| Priority date | — |
| Expiry date | Jan 4, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides for a method and an apparatus for implementing corrected species by monitoring state parameters in a manufacturing process. A process run of semiconductor devices is performed. Production data relating to the process run of semiconductor devices is acquired. The acquired production data is stored into a production database. A recipe management analysis is performed. The apparatus of the present invention comprises: a recipe management system; a first machine interface connected to said recipe management system; a processing tool connected to said first machine interface; and a fault detection system connected to said first machine interface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.