Time-resolved emission microscopy system
US6469529B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2000 |
| Grant date | Oct 22, 2002 |
| Priority date | — |
| Expiry date | May 30, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Integrated circuit devices are analyzed using an integrated system adapted to obtain time-resolved information from the back side of a silicon based semiconductor chip using hot carrier emissions. According to an example embodiment of the present invention, a system is adapted to analyze a semiconductor device under test (DUT) using a plurality of sensors mounted to a microscope having an objective lens. The plurality of sensors include a global acquisition sensor, a single-point acquisition sensor, and a navigation sensor. The integrated system is adapted to use the plurality of sensors individually and simultaneously. The integrated system improves the analysis of the DUT for reasons including that it makes possible the performance of more than one type of analysis simultaneously using a single test arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.