Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly
US6471460B1 · kind B1 · utility
4Cited by
8References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2000 |
| Grant date | Oct 29, 2002 |
| Priority date | — |
| Expiry date | Aug 31, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus is set forth for providing access to individual workpiece positions in a microelectronic workpiece cassette. The assembly comprises a workpiece cassette inventory assembly having a plurality of cassette inventory cassette supports, which are selectively aligned with the staging cassette supports of a workpiece staging assembly. This allows a plurality of cassettes to be separately indexed, thereby enabling the workpiece staging assembly to access multiple cassettes and process a larger number of microelectronic workpieces between loading/unloading cycles that require user activity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.