John M. Pedersen
18Patents
10h-index
19Co-inventors
65Inventor score
Filing activity: Mar 31, 1995 → Oct 12, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6309524A | Methods and apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 64 | Expired |
| US5660517A | Semiconductor processing system with wafer container docking and loading station | Emerging Cross-Sectional Technologies | 63 | Expired |
| US6309520A | Methods and apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 61 | Expired |
| US6303010A | Methods and apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 55 | Expired |
| US6773560B2 | Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces | Chemistry; Metallurgy | 28 | Expired |
| US6869510B2 | Methods and apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 22 | Expired |
| US6699373B2 | Apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 19 | Expired |
| US6645356B1 | Methods and apparatus for processing the surface of a microelectronic workpiece | Chemistry; Metallurgy | 16 | Expired |
| US6527925B1 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Chemistry; Metallurgy | 11 | Expired |
| US6911127B2 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Chemistry; Metallurgy | 10 | Expired |
| US6673216B2 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | Electricity | 9 | Expired |
| US6962649B2 | Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces | Chemistry; Metallurgy | 5 | Expired |
| US7645366B2 | Microelectronic workpiece holders and contact assemblies for use therewith | Chemistry; Metallurgy | 4 | Active |
| US6471460B1 | Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6939448B2 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7048841B2 | Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7288179B2 | Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | Electricity | 0 | Expired |
| US7288172B2 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.