Enhanced lift pin
US6515261B1 · kind B1 · utility
16Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2002 |
| Grant date | Feb 4, 2003 |
| Priority date | — |
| Expiry date | Mar 6, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus and method for thermally processing a substrate employs lift pin for supporting or contacting the substrate while conveying radiation from the substrate to a detector and/or processor through a hollow member. The lift pin comprises a contact member flexibly mounted on the hollow member to adjust to the angle of the substrate. By conforming the orientation of the contact member to the angle of the substrate, accurate detection and processing of the substrate may be performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.