Eugene Smargiassi
19Patents
11h-index
28Co-inventors
72Inventor score
Filing activity: Oct 15, 1998 → Jul 6, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7935940B1 | Measuring in-situ UV intensity in UV cure tool | Electricity | 542 | Active |
| US6535628B2 | Detection of wafer fragments in a wafer processing apparatus | Physics | 44 | Expired |
| US6231716A | Processing chamber with rapid wafer exchange | Emerging Cross-Sectional Technologies | 38 | Expired |
| US8454750B1 | Multi-station sequential curing of dielectric films | Electricity | 29 | Active |
| US8282768B1 | Purging of porogen from UV cure chamber | Electricity | 22 | Active |
| US8629068B1 | Multi-station sequential curing of dielectric films | Electricity | 21 | Active |
| US8283644B2 | Measuring in-situ UV intensity in UV cure tool | Electricity | 19 | Active |
| US6515261B1 | Enhanced lift pin | Chemistry; Metallurgy | 16 | Expired |
| US8980769B1 | Multi-station sequential curing of dielectric films | Electricity | 15 | Active |
| US8734663B2 | Purging of porogen from UV cure chamber | Electricity | 13 | Active |
| US8518210B2 | Purging of porogen from UV cure chamber | Electricity | 12 | Active |
| US9073100B2 | Method and apparatuses for reducing porogen accumulation from a UV-cure chamber | Electricity | 7 | Active |
| US6807972B2 | Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber | Emerging Cross-Sectional Technologies | 7 | Expired |
| US9384959B2 | Purging of porogen from UV cure chamber | Electricity | 6 | Active |
| US9873946B2 | Multi-station sequential curing of dielectric films | Electricity | 3 | Active |
| US10020197B2 | Method for reducing porogen accumulation from a UV-cure chamber | Electricity | 2 | Active |
| US10121682B2 | Purging of porogen from UV cure chamber | Electricity | 2 | Active |
| US10240236B2 | Clean resistant windows for ultraviolet thermal processing | Performing Operations; Transporting | 0 | Active |
| US11177131B2 | Method and apparatuses for reducing porogen accumulation from a UV-cure chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.