Gripper assembly
US6520315B1 · kind B1 · utility
6Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2000 |
| Grant date | Feb 18, 2003 |
| Priority date | — |
| Expiry date | Oct 26, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The invention provides a gripper assembly comprising a mounting base having a first magnet coupled thereto and having a moveable gripper coupled to the mounting base. The moveable gripper has a second magnet coupled thereto and comprises an end effector adapted to contact a wafer. The first and second magnets are adapted so that the magnetic force therebetween biases the end effector away from the mounting base. An inventive method of gripping a substrate comprises coupling a moveable gripper to a mounting base and magnetically biasing the moveable gripper in a closed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.