Patent · US Expired

Data processing device test apparatus and method therefor

US6546513B1 · kind B1 · utility

8Cited by
10References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 2, 2000
Grant dateApr 8, 2003
Priority date
Expiry dateJan 31, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/307
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus mechanism for testing data processing devices are implemented. The test mechanism isolates critical paths by correlating a scanning microscope image with a selected speed path failure. A trigger signal having a preselected value is generated at the start of each pattern vector. The sweep of the scanning microscope is controlled by a computer, which also receives and processes the image signals returned from the microscope. The value of the trigger signal is correlated with a set of pattern lines being driven on the DUT. The trigger is either asserted or negated depending the detection of a pattern line failure and the particular line that failed. In response to the detection of the particular speed path failure being characterized, and the trigger signal, the control computer overlays a mask on the image of the device under test (DUT). The overlaid image provides a visual correlation of the failure with the structural elements of the DUT at the level of resolution of the microscope itself.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.