Use of contamination-free manufacturing data in fault detection and classification as well as in run-to-run control
US6560504B1 · kind B1 · utility
35Cited by
6References
13Claims
0Family size
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Key dates
| Filing date | Sep 29, 1999 |
| Grant date | May 6, 2003 |
| Priority date | — |
| Expiry date | Sep 29, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is provided for manufacturing, the method including processing a workpiece in a processing step, detecting defect data after the processing of the workpiece in the processing step has begun and forming an output signal corresponding to at least one type of defect based on the defect data. The method also includes feeding back a control signal based on the output signal to adjust the processing performed in the processing step to reduce the at least one type of defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.