Iraj Emami
11Patents
8h-index
16Co-inventors
61Inventor score
Filing activity: Mar 4, 1999 → Aug 31, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6297644A | Multipurpose defect test structure with switchable voltage contrast capability and method of use | Physics | 114 | Expired |
| US6452412B1 | Drop-in test structure and methodology for characterizing an integrated circuit process flow and topography | Electricity | 110 | Expired |
| US6560504B1 | Use of contamination-free manufacturing data in fault detection and classification as well as in run-to-run control | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6268717A | Semiconductor test structure with intentional partial defects and method of use | Electricity | 23 | Expired |
| US7158896B1 | Real time immersion medium control using scatterometry | Physics | 20 | Expired |
| US6242273A | Fractal filter applied to a contamination-free manufacturing signal to improve signal-to-noise ratios | Electricity | 15 | Expired |
| US6294397A | Drop-in test structure and abbreviated integrated circuit process flow for characterizing production integrated circuit process flow, topography, and equipment | Electricity | 10 | Expired |
| US7334202B1 | Optimizing critical dimension uniformity utilizing a resist bake plate simulator | Physics | 10 | Active |
| US7460922B1 | Scanner optimization for reduced across-chip performance variation through non-contact electrical metrology | Physics | 5 | Active |
| US7221060B1 | Composite alignment mark scheme for multi-layers in lithography | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7373215B2 | Transistor gate shape metrology using multiple data sources | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.