Apparatus and method for increasing throughput in fluid processing

US6561220B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Kenneth McCullough · Fishkill, US
• Wayne M. Moreau · Wappingers Falls, US
• John P. Simons · Cold Spring, US
• Charles J. Taft · Wappingers Falls, US
• John M. Cotte · New Fairfield, US

Key dates

• Filing date: Apr 23, 2001
• Grant date: May 13, 2003
• Expiry date: Aug 3, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/86035
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method and an apparatus, the apparatus including appropriate valves and conduits, for increasing throughput in pressurized fluid processing including storing in a storage chamber of the apparatus a quantity of fluid at a pressure higher than a pressure at which an operation is to take place, while a processing chamber is depressurized to allow reception of a new object; sealing the processing chamber; and allowing fluid stored in the storage chamber to pass to the processing chamber to re-pressurize the processing chamber before performing the operation. The fluid may be preheated in the storage chamber to further reduce processing times.