John P. Simons
39Patents
11h-index
26Co-inventors
71Inventor score
Filing activity: Feb 17, 1995 → Oct 2, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6558475B1 | Process for cleaning a workpiece using supercritical carbon dioxide | Emerging Cross-Sectional Technologies | 63 | Expired |
| US6346484B1 | Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures | Electricity | 38 | Expired |
| US6561220B2 | Apparatus and method for increasing throughput in fluid processing | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6425956B1 | Process for removing chemical mechanical polishing residual slurry | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6398875B1 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6622507B2 | Electromechanical device and a process of preparing same | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6451375B1 | Process for depositing a film on a nanometer structure | Performing Operations; Transporting | 14 | Expired |
| US6656666B2 | Topcoat process to prevent image collapse | Electricity | 13 | Expired |
| US5593812A | Photoresist having increased sensitivity and use thereof | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7361444B1 | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6834671B2 | Check valve for micro electro mechanical structure devices | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6875286B2 | Solid CO2 cleaning | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6454869B1 | Process of cleaning semiconductor processing, handling and manufacturing equipment | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7081208B2 | Method to build a microfilter | Performing Operations; Transporting | 9 | Expired |
| US6736906B2 | Turbine part mount for supercritical fluid processor | Performing Operations; Transporting | 9 | Expired |
| US6673521B2 | Supercritical fluid(SCF) silylation process | Physics | 8 | Expired |
| US6838015B2 | Liquid or supercritical carbon dioxide composition | Chemistry; Metallurgy | 8 | Expired |
| US6890855B2 | Process of removing residue material from a precision surface | Electricity | 8 | Expired |
| US6509136B1 | Process of drying a cast polymeric film disposed on a workpiece | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6683008B1 | Process of removing ion-implanted photoresist from a workpiece | Electricity | 7 | Expired |
| US5753412A | Photoresist having increased sensitivity and use thereof | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7709177B2 | Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereof | Emerging Cross-Sectional Technologies | 6 | Active |
| US5770345A | Photoresist having increased sensitivity and use thereof | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6457480B1 | Process and apparatus for cleaning filters | Performing Operations; Transporting | 4 | Expired |
| US6927393B2 | Method of in situ monitoring of supercritical fluid process conditions | Physics | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.