System and method for illuminating a semiconductor processing system
US6572252B1 · kind B1 · utility
10Cited by
18References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2000 |
| Grant date | Jun 3, 2003 |
| Priority date | — |
| Expiry date | Jun 9, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67005
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to illuminating an interior portion of a processing chamber in a semiconductor processing system. A fiber optic light source is operatively associated with the processing chamber to illuminate the interior of the chamber to facilitate viewing the interior of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.