Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber
US6598615B1 · kind B1 · utility
8Cited by
6References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2000 |
| Grant date | Jul 29, 2003 |
| Priority date | — |
| Expiry date | Nov 7, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86163
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for use in conjunction with a plasma reaction chamber provide both throttling functionality and independent vacuum isolation for a turbomolecular pump. A throttle valve provides for precise reaction chamber pressure regulation, and a gate valve prevents extended exposure of the turbomolecular pump to atmospheric conditions during cleaning or other maintenance operations. The throttle valve and the gate valve may be actuated independently.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.