Method and apparatus for controlling a tool using a baseline control script

US6615098B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Christopher A. Bode · Austin, US
• Alexander J. Pasadyn · Austin, US
• Anthony J. Toprac · Austin, US
• Joyce S. Oey Hewett · Austin, US
• Anastasia Oshelski Peterson · Austin, US
• Thomas J. Sonderman · Austin, US
• Michael L. Miller · Huntersville, US

Key dates

• Filing date: Feb 21, 2001
• Grant date: Sep 2, 2003
• Expiry date: Jun 14, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method for controlling a manufacturing system includes processing workpieces in a plurality of tools; initiating a baseline control script for a selected tool of the plurality of tools; providing context information for the baseline control script; determining a tool type based on the context information; selecting a control routine for the selected tool based on the tool type; and executing the control routine to generate a control action for the selected tool. A manufacturing system includes a plurality of tools adapted to process workpieces, a control execution manager, and a control executor. The control execution manager is adapted to initiate a baseline control script for a selected tool of the plurality of tools and provide context information for the baseline control script. The control executor is adapted to execute the baseline control script, determine a tool type based on the context information, select a control routine for the selected tool based on the tool type, and execute the control routine to generate a control action for the selected tool.