Drip manifold for uniform chemical delivery
US6622335B1 · kind B1 · utility
28Cited by
13References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2000 |
| Grant date | Sep 23, 2003 |
| Priority date | — |
| Expiry date | Mar 29, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S239/19
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A drip manifold having drip nozzles configured to form controlled droplets is provided for use in wafer cleaning systems. The drip manifold includes a plurality of drip nozzles that are secured to the drip manifold. Each of the plurality of drip nozzles has a passage defined between a first end and a second end. A sapphire orifice is defined within the passage and is located at the first end of the drip nozzle. The sapphire orifice is angled to produce a fluid stream that is reflected within the passage and toward the second end to form one or more uniform drops over a brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.