Scanning electron microscope
US6657193B2 · kind B2 · utility
4Cited by
1References
5Claims
0Family size
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Key dates
| Filing date | Oct 21, 2002 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Oct 21, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2605
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption current. A scanning electron microscope irradiates an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect generated ions and display a sample image. An ion detecting electrode is provided exclusively for detecting ions. The ion detecting electrode is arranged nearby a path for accelerating ions by a bias electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.