Configuration for measurement of internal voltages of an integrated semiconductor apparatus

US6657452B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Peter Beer · Waldshut-Tiengen, DE
• Carsten Ohlhoff · Hersbruck, DE

Key dates

• Filing date: Dec 18, 2000
• Grant date: Dec 2, 2003
• Expiry date: Dec 18, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R19/165
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a configuration for the measurement of internal voltages in a DUT (2), in which a comparator (3) is provided in each DUT (2) and compares the internal voltage (Vint) to be measured with an externally supplied reference voltage (Vref).