Supercritical fluid(SCF) silylation process
US6673521B2 · kind B2 · utility
8Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2000 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Dec 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/265
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process of silylation of object surfaces using a mixture of a silylation agent in admixture with an inert liquified gas, such as carbon dioxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.