Trench capacitor and method for manufacturing the same

US6674113B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Matthias Goldbach · Dresden, DE
• Thomas Hecht · Dresden, DE
• Jorn Lutzen · Dresden, DE
• Bernhard Sell · Dresden, DE

Key dates

• Filing date: Sep 25, 2002
• Grant date: Jan 6, 2004
• Expiry date: Sep 25, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/038

Abstract

A trench capacitor has a first capacitor electrode, a second capacitor electrode, and a dielectric, which is arranged between the capacitor electrodes. The first capacitor electrode has a tube-like structure, which extends into a substrate. The second capacitor electrode includes a first section which is opposite to the internal side of the tube-like structure, with the dielectric arranged therebetween, and a second section, which is opposite to the external side of the tube-like structure with the dielectric arranged therebetween.