Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewith
US6685853B1 · kind B1 · utility
62Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2000 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Jul 12, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention is an admixture of an electrically conductive material and an energy sensitive material resulting in a conductive energy sensitive composition. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resists from electron beams. The compositions are also useful in applications of scanning electron metrology and static dissipation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.