Cleanroom lift having an articulated arm
US6688838B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2002 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Mar 12, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB25J18/04
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable carriage coupled to a linkage assembly. The linkage assembly has a first link and a second link. Each link has one piece construction to minimize deflection under load. The first link is coupled to the carriage by a carriage shaft assembly and to the second link by a linkage shaft assembly. The second link is coupled to the linkage shaft assembly and a gripper assembly. Optionally, a third link and second shaft assembly may be disposed between the gripper assembly and the second link to minimize the weight of the links to facilitate assembly in cleanroom environments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.