Inventor · Sunnyvale, CA, US

Michael Rosenstein

43Patents
16h-index
57Co-inventors
84Inventor score

Filing activity: Jun 5, 1995 → Jul 8, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9014848B2 Mobile robot system Emerging Cross-Sectional Technologies 130 Active
US5690795A Screwless shield assembly for vacuum processing chambers Emerging Cross-Sectional Technologies 79 Expired
US5860640A Semiconductor wafer alignment member and clamp ring Emerging Cross-Sectional Technologies 74 Expired
US8958911B2 Mobile robot Emerging Cross-Sectional Technologies 71 Active
US8972061B2 Autonomous coverage robot Emerging Cross-Sectional Technologies 63 Active
US6221221A Apparatus for providing RF return current path control in a semiconductor wafer processing system Electricity 62 Expired
US6228236A Sputter magnetron having two rotation diameters Electricity 59 Expired
US8918209B2 Mobile human interface robot Emerging Cross-Sectional Technologies 45 Active
US8200600B2 Electronic system condition monitoring and prognostics Physics 35 Active
US8930019B2 Mobile human interface robot Physics 33 Active
US9902069B2 Mobile robot system Emerging Cross-Sectional Technologies 27 Active
US6730174B2 Unitary removable shield assembly Chemistry; Metallurgy 27 Expired
US8935005B2 Operating a mobile robot Emerging Cross-Sectional Technologies 24 Active
US6660134B1 Feedthrough overlap coil Electricity 21 Expired
US8742926B2 Debris monitoring Human Necessities 20 Active
US8918213B2 Mobile human interface robot Emerging Cross-Sectional Technologies 20 Active
US9400503B2 Mobile human interface robot Emerging Cross-Sectional Technologies 15 Active
US6589407B1 Aluminum deposition shield Electricity 15 Expired
USD442852S Squared overlap coil General 13 Expired
US6669829B2 Shutter disk and blade alignment sensor Chemistry; Metallurgy 11 Expired
US7148435B2 Build-in LOTO device on equipment breaker panel Electricity 10 Expired
US9498886B2 Mobile human interface robot Emerging Cross-Sectional Technologies 10 Active
US9233471B2 Debris monitoring Human Necessities 10 Active
US7097744B2 Method and apparatus for controlling darkspace gap in a chamber Electricity 9 Expired
US9826872B2 Debris monitoring Human Necessities 9 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.