Method for prioritizing production lots based on grade estimates and output requirements

US6699727B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Anthony J. Toprac · Austin, US
• Joyce S. Oey Hewett · Austin, US
• Christopher A. Bode · Austin, US
• Alexander J. Pasadyn · Austin, US
• Anastasia Oshelski Peterson · Austin, US
• Thomas J. Sonderman · Austin, US
• Michael L. Miller · Huntersville, US

Key dates

• Filing date: Mar 29, 2001
• Grant date: Mar 2, 2004
• Expiry date: Jan 3, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method for prioritizing production flow includes processing a plurality of manufactured items in a process flow; measuring characteristics of a plurality of manufactured items in the process flow; estimating performance grades for the plurality of manufactured items based on the measured characteristics; grouping the manufactured items with like estimated performance grades; assigning priorities to groups of manufactured items with like estimated performance grades; and directing the plurality of manufactured items through the process flow based on the assigned priorities. A manufacturing system includes a plurality of processing tools adapted to process a plurality of manufactured items in a process flow, a metrology tool, and a process control server. The metrology tool is adapted to measure characteristics of a plurality of manufactured items in the process flow. The process control server is adapted to estimate performance grades for the plurality of manufactured items based on the measured characteristics, group the manufactured items with like estimated performance grades, assign priorities to groups of manufactured items with like estimated performance grades, and direct t…