Optical analysis for SOI integrated circuits

US6716683B1 · kind B1 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Michael R. Bruce · Austin, US
• Glen Gilfeather · Helotes, US
• Rama R. Goruganthu · Austin, US
• Jiann Min Chin · Singapore, SG
• Shawn M. McBride · Austin, US

Key dates

• Filing date: Jun 22, 2001
• Grant date: Apr 6, 2004
• Expiry date: Nov 30, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/66
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated circuit die having silicon on insulator (SOI) structure is analyzed in a manner that enhances the ability to detect photoemissions from the die. According to an example embodiment of the present invention, one of two or more lenses having a higher relative photon count is identified and used to analyze a semiconductor die. The die has at least a portion of the insulator of the SOI structure exposed, and photon emissions are detected using each lens via the exposed insulator in response to the die being stimulated. The number of photons detected using each lens is compared, and the lens having a higher photon count rate is identified, optimizing the photon count for the particular type of die preparation used to expose the insulator. The identified lens is then used with the high-speed detector to detect photoemissions from the die, and the detected photoemissions are used to analyze the die.