Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework
US6725402B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2000 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Feb 7, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.