Motorized chamber lid

US6776848B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Michael Rosenstein · Sunnyvale, US
• Alex Shenderovich · San Francisco, US
• Marc Schweitzer · San Jose, US
• Ilya Lavitsky · San Francisco, US
• Alvin Lau · San Francisco, US
• Michael Feltsman · San Francisco, US

Key dates

• Filing date: Jan 17, 2002
• Grant date: Aug 17, 2004
• Expiry date: Apr 11, 2022

Classification

• Technology area (CPC E): Fixed Constructions
• CPC primary: E05Y2999/00
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.