Bi-convex solid immersion lens
US6778327B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 2003 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | May 19, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B2007/13727
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A bi-convex solid immersion lens is disclosed. Unlike conventional plano-convex solid immersion lenses having a flat bottom surface, the disclosed lens has a convex bottom surface. The radius of curvature of the bottom surface is smaller than that of the object to be inspected. This construction allows for a more accurate determination of the location of the inspected feature, and enhances coupling of light between the immersion lens and the inspected object. The disclosed lens is particularly useful for use in microscope for inspection of semiconductor devices and, especially flip-chip (or chip scale) packaged devices. The immersion lens can also be incorporated in a read or read/write head of optical memory media.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.