Test vehicle with zig-zag structures
US6787800B2 · kind B2 · utility
11Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2002 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Jul 24, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test vehicle has a plurality of the zig-zag structures which include: a first layer having a plurality of first elongated patterns oriented in a first direction; a second layer having a plurality of second elongated patterns oriented in a second direction substantially perpendicular to the first direction; and a plurality of vias or contacts conductively coupling ones of the first patterns to respective ones of the second patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.