System and method for product yield prediction using device and process neighborhood characterization vehicle
US6795952B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2002 |
| Grant date | Sep 21, 2004 |
| Priority date | — |
| Expiry date | Mar 22, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method for predicting yield of integrated circuits includes a characterization vehicle (12) having at least one feature representative of at least one type of feature to be incorporated in the final integrated circuit, preferably a device neighborhood, process neighborhood characterization vehicle. The characterization vehicle (12) is subjected to process operations making up the fabrication cycle to be used in fabricating the integrated circuit in order to produce a yield model (16). The yield model (16) embodies a layout as defined by the characterization vehicle (12) and preferably includes features which facilitates the gathering of electrical test data and testing of prototype sections at operating speeds. An extraction engine (18) extracts predetermined layout attributes (26) from a proposed product layout (20). Operating on the yield model, the extraction engine (18) produces yield predictions (22) as a function of layout attributes (26) and broken down by layers or steps in the fabrication process (14).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.