Electrical contact for high dielectric constant capacitors and method for fabricating the same
US6806187B2 · kind B2 · utility
13Cited by
25References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2001 |
| Grant date | Oct 19, 2004 |
| Priority date | — |
| Expiry date | Mar 11, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/696
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrical contact includes a non-conductive spacer surrounding conductive plug material along the full height of the contact. The spacer inhibits oxide and other diffusion through the contact. In the illustrated embodiment, the contact includes metals or metal oxides which are resistant to oxidation, and additional conductive barrier layers. The contact is particularly useful in integrated circuits which include high dielectric constant materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.