Systems and methods for measuring properties of conductive layers
US6815959B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2002 |
| Grant date | Nov 9, 2004 |
| Priority date | — |
| Expiry date | Apr 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pin configured to be disposed within a probe is provided. The probe may be configured to measure a property of a conductive layer. The pin may include a contact surface which may be substantially planar. The pin may also include a first portion extending from the contact surface. A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface across a length of the first portion. A system configured to measure a property of a conductive layer is also provided. The system may include a mounting device and at least two probes coupled to the mounting device. The probes may be configured to measure the property of a conductive layer. In addition, the mounting device may be configured such that one of the probes may contact the conductive layer during measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.