Semiconductor processing apparatus
US6825617B2 · kind B2 · utility
28Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2003 |
| Grant date | Nov 30, 2004 |
| Priority date | — |
| Expiry date | Feb 27, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor processing apparatus that processes a semiconductor wafer disposed in a process chamber of a processing apparatus main unit includes a setting unit for enabling a user to set a temperature of the semiconductor wafer and control unit for controlling a processing of the semiconductor wafer based on the temperature of the semiconductor wafer set by the setting unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.