Check valve for micro electro mechanical structure devices

US6834671B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• John M. Cotte · New Fairfield, US
• Kenneth McCullough · Fishkill, US
• Wayne M. Moreau · Wappingers Falls, US
• John P. Simons · Cold Spring, US
• Charles J. Taft · Wappingers Falls, US
• Richard P. Volant · New Fairfield, US

Key dates

• Filing date: Dec 22, 2003
• Grant date: Dec 28, 2004
• Expiry date: Dec 22, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/7904
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A check valve for micro electro mechanical structure devices (MEMS), and in particular pertains to a check valve which is adapted to be employed in connection with micro electro mechanical structure devices which are intended to be employed with supercritical fluids constituting working fluids. In a preferred embodiment, the check valve is equipped with a bypass channel including a freely moveable plug structure which, in the open position of the valve enables the ingress of supercritical fluids under high superatmospheric pressures, and subsequent to the filling of the system, let down to atmospheric pressure, causes the plug to be moved into a permanent valve-closed position.