Liquid or supercritical carbon dioxide composition
US6838015B2 · kind B2 · utility
8Cited by
16References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2001 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Jan 25, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A composition which includes liquid or supercritical carbon dioxide and an acid having a pKa of less than about 4. The composition is employed in a process of removing residue from a precision surface, such as a semiconductor sample, in which the precision surface is contacted with the composition under thermodynamic conditions consistent with the retention of the liquid or supercritical carbon dioxide in the liquid or supercritical state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.