Carrier head with a modified flexible membrane
US6855043B1 · kind B1 · utility
16Cited by
34References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2000 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Jul 7, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/32
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a load to a substrate and a retaining ring. The friction coefficient of the lower surface of the flexible membrane is increased to prevent contact between the substrate and the retaining ring, thereby preventing slurry compaction and buildup and substrate deformation caused by such contact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.