Apparatus for specimen fabrication and method for specimen fabrication
US6858851B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2003 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Jul 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-sample prepared by processing with an ion beam is extracted by a probe and, in this state, a voltage is applied across the probe and a micro-sample holder by a circuit for sending electric current to probe. Thereafter, a probe driver is moved by a probe position controller to cause a portion of the probe distanced from the tip thereof by about 5 μm toward the root side thereof to approach an end surface of an ear portion of the micro-sample holder, so that the probe and the micro-sample holder are fixed together at a bonding point by current welding. Then, by cutting a root-side portion, relative to the bonding point, of the probe using an ion beam, fixation of the micro-sample to the micro-sample holder via the tip of the probe is completed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.