Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
US6859278B1 · kind B1 · utility
18Cited by
28References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2002 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Feb 21, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4711
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.